Patterning sub-micron scale channel structures on glass by chemical etching

Chowdhury, Devasish ; Paul, Anumita ; Chattopadhyay, Arun (2004) Patterning sub-micron scale channel structures on glass by chemical etching Indian Journal of Physics, 78A (2). pp. 193-196. ISSN 0973-1458

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Official URL: http://www.springer.com/physics/journal/12648

Abstract

We report a soft lithog. based approach in generating predetd. channel structures, in the form of parallel lines and cross patterns at the sub-micron scale, by chem. etching of glass slides. We have used the polycarbonate part of a com. available compact disk as the mold to generate suitable imprints. The mold contains parallel lines in the form of crest and trough of submicron dimensions. Aq. HF soln. was used as the ink. This method of imprinting patterns generated a neg. replica of crests and troughs on glass slides. Cross patterns with submicron scale channel structures could also be obtained if the slide was etched twice with the inked mold.

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ID Code:101482
Deposited On:15 Dec 2016 12:08
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