Characterization of ion beam induced nanostructures

Ghatak, J. ; Satpati, B. ; Umananda, M. ; Kabiraj, D. ; Som, T. ; Dev, B. N. ; Akimoto, K. ; Ito, K. ; Emoto, T. ; Satyam, P. V. (2006) Characterization of ion beam induced nanostructures Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 244 (1). pp. 45-51. ISSN 0168-583X

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Tailoring of nanostructures with energetic ion beams has become an active area of research leading to the fundamental understanding of ion-solid interactions at nanoscale regime and with possible applications in the near future. Rutherford backscattering spectrometry (RBS), high resolution transmission electron microscopy (HRTEM) and asymmetric X-ray Bragg-rocking curve experimental methods have been used to characterize ion-induced effects in nanostructures. The possibility of surface and sub-surface/interface alloying at nano-scale regime, ion-beam induced embedding, crater formation, sputtering yield variations for systems with isolated nanoislands, semi-continuous and continuous films of noble metals (Au, Ag) deposited on single crystalline silicon will be reviewed. MeV-ion induced changes in specified Au-nanoislands on silicon substrate are tracked as a function of ion fluence using ex situ TEM. Strain induced in the bulk silicon substrate surface due to 1.5 MeV Au2+ and C2+ ion beam irradiation is determined by using HRTEM and asymmetric Bragg X-ray rocking curve methods. Preliminary results on 1.5 MeV Au2+ ion-induced effects in nanoislands of Co deposited on silicon substrate will be discussed.

Item Type:Article
Source:Copyright of this article belongs to Elsevier Science.
Keywords:Ion Irradiation; Nanoislands; Strain; HRTEM; Asymmetric X-ray Bragg Reflection
ID Code:10122
Deposited On:02 Nov 2010 10:32
Last Modified:30 May 2011 05:43

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