Items where Author is "Waghmare, Parag"Group by: Item Type | No Grouping Jump to: Article Number of items: 1. ArticlePatil, Samadhan B. ; Kumbhar, Alka ; Waghmare, Parag ; Ramgopal Rao, V. ; Dusane, R. O. (2001) Low temperature silicon nitride deposited by Cat-CVD for deep sub-micron metal-oxide-semiconductor devices Thin Solid Films, 395 (1-2). pp. 270-274. ISSN 0040-6090 |
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