Items where Author is "Vaidya, Sangeeta"Group by: Item Type | No Grouping Jump to: Article Number of items: 1. ArticlePatil, Samadhan B. ; Vaidya, Sangeeta ; Kumbhar, Alka ; Dusane, R. O. ; Chandorkar, A. N. ; Ramgopal Rao, V. (2000) Low temperature Hot-Wire CVD nitrides for deep sub-micron CMOS technologies SPIE Proceedings Series, 3975 (2). pp. 879-882. ISSN 1017-2653 |
| Login | Create Account |
![[up]](/style/images/multi_up.png)
Up a level