Items where Author is "Tarey, R. D."Group by: Item Type | No Grouping Jump to: Article Number of items: 2. ArticleAgrawal, Neeta ; Tarey, R. D. ; Chopra, K. L. (1991) Etching of crystalline and amorphous silicon in CClF3 plasma Thin Solid Films, 198 (1-2). pp. 393-399. ISSN 0040-6090 Agrawal, Neeta ; Tarey, R. D. ; Chopra, K. L. (1989) Effect of hydrogen plasma treatment on CF4 plasma etching characteristics of single-crystal, polycrystalline, and amorphous silicon Journal of Vacuum Science and Technology A, 7 (4). pp. 2701-2704. ISSN 0734-2101 |
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