Items where Author is "Rao, Ramgopal"

Article

Ray, Prasenjit ; Seena, V. ; Apte, Prakash R. ; Rao, Ramgopal (2011) High yield polymer MEMS process for CMOS/MEMS integration MRS proceedings, 1299 . pp. 1-5. ISSN 1946-4274

Waghmare, Parag C. ; Patil, Samadhan B. ; Kumbhar, Alka A. ; Rao, Ramgopal ; Dusane, R. O. (2003) Nitrogen dilution effects on structural and electrical properties of hot wire deposited a-SiN:H films for deep sub-micron CMOS technologies Thin Solid Films, 430 (1-2). pp. 189-191. ISSN 0040-6090