Items where Author is "Kumbhar, Alka A."

Patil, Samadhan B. ; Vairagar, Anand V. ; Kumbhar, Alka A. ; Sahu, Laxmi K. ; Ramgopal Rao, V. ; Venkatramani, N. ; Dusane, R. O. ; Schroeder, B. (2003) Highly conducting doped poly-Si deposited by hot wire CVD and its applicability as gate material for CMOS devices Thin Solid Films, 430 (1-2). pp. 63-66. ISSN 0040-6090

Waghmare, Parag C. ; Patil, Samadhan B. ; Kumbhar, Alka A. ; Rao, Ramgopal ; Dusane, R. O. (2003) Nitrogen dilution effects on structural and electrical properties of hot wire deposited a-SiN:H films for deep sub-micron CMOS technologies Thin Solid Films, 430 (1-2). pp. 189-191. ISSN 0040-6090