Sinha, S. K. ; Sanyal, M. K. ; Satija, S. K. ; Majkrzak, C. F. ; Neumann, D. A. ; Homma, H. ; Szpala, S. ; Gibaud, A. ; Morkoc, H. (1994) X-ray scattering studies of surface roughness of GaAs/A1As multilayers Physica B: Condensed Matter, 198 (1-3). pp. 72-77. ISSN 0921-4526
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Official URL: http://www.sciencedirect.com/science/article/pii/0...
Related URL: http://dx.doi.org/10.1016/0921-4526(94)90131-7
Abstract
We discuss the theory of X-ray scattering from multilayers with conformal roughness of the interfaces, and illustrate with an analysis of specular, diffuse and wide-angle scattering from a GaAs/A1As multilayer. This is a highly coherent multilayer structure deposited on a stepped, but otherwise smooth surface. The roughness due to the steps propagates through the layers and a distinct anisotropy is observed in the diffuse scattering. We discuss a method to treat diffuse scattering from such surfaces with slightly irregular steps.
| Item Type: | Article |
|---|---|
| Source: | Copyright of this article belongs to Elsevier Science. |
| ID Code: | 61350 |
| Deposited On: | 15 Sep 2011 03:42 |
| Last Modified: | 15 Sep 2011 03:42 |
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