Hariharan, P. ; Roy, Maitreyee (1996) Achromatic phase-shifting for two-wavelength phase-stepping interferometry Optics Communications, 126 (4-6). pp. 220-222. ISSN 0030-4018
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Official URL: http://linkinghub.elsevier.com/retrieve/pii/003040...
Related URL: http://dx.doi.org/10.1016/0030-4018(96)00118-6
Abstract
Achromatic phase-shifting can be used with two-wavelength illumination in a polarization interferometer to provide a quick and simple method for profiling surfaces exhibiting steps with heights of a few micrometres.
Item Type: | Article |
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Source: | Copyright of this article belongs to Elsevier Science. |
ID Code: | 12525 |
Deposited On: | 13 Nov 2010 13:24 |
Last Modified: | 03 Jun 2011 06:50 |
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