Achromatic phase-shifting for two-wavelength phase-stepping interferometry

Hariharan, P. ; Roy, Maitreyee (1996) Achromatic phase-shifting for two-wavelength phase-stepping interferometry Optics Communications, 126 (4-6). pp. 220-222. ISSN 0030-4018

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Official URL: http://linkinghub.elsevier.com/retrieve/pii/003040...

Related URL: http://dx.doi.org/10.1016/0030-4018(96)00118-6

Abstract

Achromatic phase-shifting can be used with two-wavelength illumination in a polarization interferometer to provide a quick and simple method for profiling surfaces exhibiting steps with heights of a few micrometres.

Item Type:Article
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ID Code:12525
Deposited On:13 Nov 2010 13:24
Last Modified:03 Jun 2011 06:50

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